Corning in the US is to receive a grant of $32m to boost production of specialist glass for EUV lithography equipment.

The grant, under the CHIPS and Science Act, follows the launch of a $1bn research centre to develop a sovereign supply chain for EUV process technology in the US. 

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The funding aims to increase production of Corning HPFS Fused Silica (High Purity Fused Silica) (HPFS) and EXTREME ULE Glass (Ultra Low Expansion Glass) and scale a novel technology manufacturing process at the site in Canton, New York.

HFPS and ULE materials are key components of deep ultraviolet (DUV) and extreme ultraviolet (EUV) lithography machines and photomasks, which are important for the manufacturing of leading-edge semiconductors, and the new technology would improve EUV performance with a lower carbon footprint, says Corning.

The company launched its EXTREME ULE titania-silicate glass in September with near-zero expansion and improved flatness and consistency over the previous ULE materials.

“As the demands of integrated chipmaking grow with the rise of artificial intelligence, glass innovation is more important than ever,” said Claude Echahamian, Vice President & General Manager, Corning Advanced Optics. “EXTREME ULE Glass will expand Corning’s vital role in the ongoing pursuit of Moore’s Law by helping enable higher-powered EUV manufacturing as well as higher yield.”

This proposed grant would help enable a reliable domestic supply of these important components in the United States and help advance US technology leadership in the lithography supply chain says the US government.

The project is expected to create 130 manufacturing jobs and over 175 construction jobs.

“Our Canton facility plays a vital role in the nation’s mission to strengthen the domestic semiconductor supply chain,” said Wendell Weeks, CEO and chair of Corning. “This proposed investment and the continued commitment in Canton will enable us to establish the next-generation manufacturing capabilities needed to produce vital materials for lithography tools that will develop the world’s most complex microchips, strengthening our commitment to advancing semiconductor technology and job creation in the United States.”

The company is currently under investigation by the European Commission over its supplier agreements for alkali aluminium silicate glass, aka Gorilla Glass, used for mobile devices.